검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Improved etch resistance of ZEP 520A in reactive ion etching through heat and ultraviolet light treatment Czaplewski DA, Tallant DR, Patrizi GA, Wendt JR, Montoya B Journal of Vacuum Science & Technology B, 27(2), 581, 2009 |
| 2 |
Multilevel Interconnects for Heterojunction Bipolar-Transistor Integrated-Circuit Technologies Patrizi GA, Lovejoy ML, Enquist PM, Schneider RP, Hou HQ Thin Solid Films, 290-291, 435, 1996 |
| 3 |
Thin-Film Tantalum Nitride Resistor Technology for Phosphide-Based Optoelectronics Lovejoy ML, Patrizi GA, Rieger DJ, Barbour JC Thin Solid Films, 290-291, 513, 1996 |