검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Application of aluminum oxide and ta-C thin films deposited at room temperature by PLD in RF-MEMS fabrication Orlianges JC, Pothier A, Mercier D, Blondy P, Champeaux C, Catherinot A, De Barros MI, Pavant S Thin Solid Films, 482(1-2), 237, 2005 |