검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
EL5: One tool for advanced x-ray and chrome on glass mask making Sturans MA, Hartley JG, Pfeiffer HC, Dhaliwal RS, Groves TR, Pavick JW, Quickle RJ, Clement CS, Dick GJ, Enichen WA, Gordon MS, Kendall RA, Kostek CA, Pinckney DJ, Robinson CF, Rockrohr JD, Safran JM, Senesi JJ, Tressler EV Journal of Vacuum Science & Technology B, 16(6), 3164, 1998 |
| 2 |
Performance Enhancements on IBMs El-4 Electron-Beam Lithography System Butsch R, Enichen WA, Gordon MS, Groves TR, Hartley JG, Pavick JW, Pfeiffer HC, Quickle RJ, Rockrohr JD, Stickel W Journal of Vacuum Science & Technology B, 13(6), 2478, 1995 |