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| No. | Article |
|---|---|
| 1 |
Micromachined atomic force microscopy sensor with integrated piezoresistive, sensor and thermal bimorph actuator for high-speed tapping-mode atomic force microscopy phase-imaging in higher eigenmodes Pedrak R, Ivanov T, Ivanova K, Gotszalk T, Abedinov N, Rangelow IW, Edinger K, Tomerov E, Schenkel T, Hudek P Journal of Vacuum Science & Technology B, 21(6), 3102, 2003 |