화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Optical emission spectroscopy during fabrication of indium-tin-oxynitride films by RF-sputtering
Koufaki M, Sifakis M, Iliopoulos E, Pelekanos N, Modreanu A, Cimalla V, Ecke G, Aperathitis E
Applied Surface Science, 253(1), 405, 2006
2 Optical characterization of indium-tin-oxynitride fabricated by RF-sputtering
Aperathitis E, Modreanu M, Bender M, Cimalla V, Ecke G, Androulidaki M, Pelekanos N
Thin Solid Films, 450(1), 101, 2004