검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Deep-Level Transient Spectroscopy Study of the Damage-Induced in N-Type Silicon by a Gate Oxide Etching in a Chf3/Ar Plasma Adegboyega G, Perezquintana I, Poggi A, Susi E, Merli M Journal of Vacuum Science & Technology B, 15(3), 623, 1997 |
| 2 |
Study of the Electrical Active Defects Induced by Reactive Ion Etching in N-Type Silicon Biavati M, Perezquintana I, Poggi A, Susi E Journal of Vacuum Science & Technology B, 13(5), 2139, 1995 |