검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Nanoimprint Lithography on Silica Sol-Gels: A Simple Route to Sequential Patterning Peroz C, Chauveau V, Barthel E, Sondergard E Advanced Materials, 21(5), 555, 2009 |
| 2 |
Nanoimprint planarization of high aspect ratio nanostructures using inorganic and organic resist materials Chang ASP, Peroz C, Liang XG, Dhuey S, Harteneck B, Cabrini S Journal of Vacuum Science & Technology B, 27(6), 2877, 2009 |
| 3 |
Fabrication of novel digital optical spectrometer on chip Babin S, Peroz C, Bugrov A, Goltsov A, Ivonin I, Yankov V, Dhuey S, Cabrini S, Kley EB, Schmidt H Journal of Vacuum Science & Technology B, 27(6), 3187, 2009 |
| 4 |
Automatic measurement of electron beam size by beam metrology technique using 20 nm test pattern Peroz C, Babin S, Machin M, Anderson E, Cabrini S, Dhuey S, Harteneck B Journal of Vacuum Science & Technology B, 27(6), 3220, 2009 |
| 5 |
Glass nanostructures fabricated by soft thermal nanoimprint Peroz C, Heitz C, Barthel E, Sondergard E, Goletto V Journal of Vacuum Science & Technology B, 25(4), L27, 2007 |