화학공학소재연구정보센터
검색결과 : 4건
No. Article
1 Quantitative hydrogen measurements in PECVD and HWCVD a-Si : H using FTIR spectroscopy
Goldie DM, Persheyev SK
Journal of Materials Science, 41(16), 5287, 2006
2 Optical and electronic properties of HWCVD and PECVD silicon films irradiated using excimer and Nd : Yag lasers
Shaikh MZ, O'Neill KA, Anthony S, Persheyev SK, Rose MJ
Thin Solid Films, 501(1-2), 125, 2006
3 Laser annealed HWCVD and PECVD thin silicon films. Electron field emission
O'Neill KA, Shaikh MZ, Lyttle G, Anthony S, Fan YC, Persheyev SK, Rose MJ
Thin Solid Films, 501(1-2), 310, 2006
4 Depth profiling and the effect of oxygen and carbon on the photoelectrical properties of amorphous silicon films deposited using tungsten wire filaments
Persheyev SK, Goldie DM, Gibson RAG, Rose MJ, Anthony S, Keeble DJ, Robb K, Main C, Reynolds S, Zrinscak I
Thin Solid Films, 395(1-2), 130, 2001