화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 One-Step Electron-Beam Lithography for Multipurpose, Diffractive Optical-Elements with 200 nm Resolution
Difabrizio E, Grella L, Baciocchi M, Gentili M, Peschiaroli D, Mastrogiacomo L, Maggiora R
Journal of Vacuum Science & Technology B, 14(6), 3855, 1996
2 High-Accuracy Thickness Measurements by Means of Backscattering Electron Metrology
Baciocchi M, Difabrizio E, Gentili M, Grella L, Maggiora R, Mastrogiacomo L, Peschiaroli D
Journal of Vacuum Science & Technology B, 13(6), 2676, 1995