검색결과 : 10건
| No. | Article |
|---|---|
| 1 |
In-situ Ga doping of fully strained Ge1-xSnx heteroepitaxial layers grown on Ge(001) substrates Shimura Y, Takeuchi S, Nakatsuka O, Vincent B, Gencarelli F, Clarysse T, Vandervorst W, Caymax M, Loo R, Jensen A, Petersen DH, Zaima S Thin Solid Films, 520(8), 3206, 2012 |
| 2 |
Ultra Shallow Arsenic Junctions in Germanium Formed by Millisecond Laser Annealing Hellings G, Rosseel E, Simoen E, Radisic D, Petersen DH, Hansen O, Nielsen PF, Zschatzsch G, Nazir A, Clarysse T, Vandervorst W, Hoffmann TY, De Meyer K Electrochemical and Solid State Letters, 14(1), II39, 2011 |
| 3 |
Study of submelt laser induced junction nonuniformities using Therma-Probe Rosseel E, Bogdanowicz J, Clarysse T, Vandervorst W, Ortolland C, Hoffmann T, Salnik A, Nicolaides L, Han SH, Petersen DH, Lin R, Hansen O Journal of Vacuum Science & Technology B, 28(1), C1C21, 2010 |
| 4 |
Review of electrical characterization of ultra-shallow junctions with micro four-point probes Petersen DH, Hansen O, Hansen TM, Boggild P, Lin R, Kjaer D, Nielsen PF, Clarysse T, Vandervorst W, Rosseel E, Bennett NS, Cowern NEB Journal of Vacuum Science & Technology B, 28(1), C1C27, 2010 |
| 5 |
Sensitivity study of micro four-point probe measurements on small samples Wang F, Petersen DH, Hansen TM, Henriksen TR, Boggild P, Hansen O Journal of Vacuum Science & Technology B, 28(1), C1C34, 2010 |
| 6 |
Electrical characterization of InGaAs ultra-shallow junctions Petersen DH, Hansen O, Boggild P, Lin R, Nielsen PF, Lin D, Adelmann C, Alian A, Merckling C, Penaud J, Brammertz G, Goossens J, Vandervorst W, Clarysse T Journal of Vacuum Science & Technology B, 28(1), C1C41, 2010 |
| 7 |
Advanced carrier depth profiling on Si and Ge with micro four-point probe Clarysse T, Eyben P, Parmentier B, Van Daele B, Satta A, Vandervorst W, Lin R, Petersen DH, Nielsen PF Journal of Vacuum Science & Technology B, 26(1), 317, 2008 |
| 8 |
Comparative study of size dependent four-point probe sheet resistance measurement on laser annealed ultra-shallow junctions Petersen DH, Lin R, Hansen TM, Rosseel E, Vandervorst W, Markvardsen C, Kjaer D, Nielsen PF Journal of Vacuum Science & Technology B, 26(1), 362, 2008 |
| 9 |
Study of the roughness in a photoresist masked, isotropic, SF6-based ICP silicon etch Larsen KP, Petersen DH, Hansen O Journal of the Electrochemical Society, 153(12), G1051, 2006 |
| 10 |
Wafer-scale fabrication of polymer distributed feedback lasers Christiansen MB, Scholer M, Balslev S, Nielsen RB, Petersen DH, Kristensen A Journal of Vacuum Science & Technology B, 24(6), 3252, 2006 |