검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Composition and growth kinetics of the interfacial layer for MOCVD HfO2 layers on Si substrates Van Elshocht S, Caymax M, De Gendt S, Conard T, Petry J, Date L, Pique D, Heyns MM Journal of the Electrochemical Society, 151(4), F77, 2004 |
| 2 |
TOF-SIMS as a rapid diagnostic tool to monitor the growth mode of thin (high k) films Conard T, Vandervorst W, Petry J, Zhao C, Besling W, Nohira H, Richard O Applied Surface Science, 203, 400, 2003 |
| 3 |
Effect of N-2 annealing on AlZrO oxide Petry J, Richard O, Vandervorst W, Conard T, Chen J, Cosnier V Journal of Vacuum Science & Technology A, 21(4), 1482, 2003 |