검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Inspection of templates for imprint lithography Hess HF, Pettibone D, Adler D, Bertsche K, Nordquist KJ, Mancini DP, Dauksher WJ, Resnick DJ Journal of Vacuum Science & Technology B, 22(6), 3300, 2004 |
| 2 |
Optical inspection of next generation, lithography masks Pettibone D, Stokowski S Journal of Vacuum Science & Technology B, 22(6), 3366, 2004 |
| 3 |
Extreme ultraviolet mask fabrication with high inspection contrast TaSiNx absorber stack Wasson JR, Weisbrod EJ, Lu B, Mangat PJS, Dauksher WJ, Resnick DJ, Sohn J, Engelstad R, Pettibone D Journal of Vacuum Science & Technology B, 21(6), 3086, 2003 |
| 4 |
Ultraviolet and direct ultraviolet inspection of next generation lithography reticles Pettibone D, Dayal A, Veldman A, Stokowski S Journal of Vacuum Science & Technology B, 20(6), 3006, 2002 |