검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Hydrogen etching of Si3N4 layers with plasma assisted hot wire CVD Kniffler N, Pflueger A, Schulz T, Sommer S, Schroeder B Thin Solid Films, 519(14), 4582, 2011 |
| 2 |
Degradation and silicidation of Ta- and W-filaments for different filament temperatures Kniffler N, Pflueger A, Scheller D, Schroeder B Thin Solid Films, 517(12), 3424, 2009 |