화학공학소재연구정보센터
검색결과 : 5건
No. Article
1 Oxide Formation and Dissolution on Silicon in KOH Electrolyte: An In-Situ Infrared Study
Philipsen HGG, Ozanam F, Allongue P, Kelly JJ, Chazalviel JN
Journal of the Electrochemical Society, 163(5), H327, 2016
2 Structural characterization of through silicon vias
Bender H, Drijbooms C, Van Marcke P, Geypen J, Philipsen HGG, Radisic A
Journal of Materials Science, 47(18), 6497, 2012
3 Influence of chemical additives on the surface reactivity of Si in KOH solution
Philipsen HGG, Kelly JJ
Electrochimica Acta, 54(13), 3526, 2009
4 Exploiting anisotropy for in situ measurement of silicon etch rates in KOH solution
Philipsen HGG, Smeenk NJ, Ligthart H, Kelly JJ
Electrochemical and Solid State Letters, 9(7), C118, 2006
5 Anisotropy in the anodic oxidation of silicon in KOH solution
Philipsen HGG, Kelly JJ
Journal of Physical Chemistry B, 109(36), 17245, 2005