검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Ionized magnetron sputter deposition of hard nanocomposite TiN/amorphous-silicon nitride films Phinichka N, Chandra R, Barber ZH Journal of Vacuum Science & Technology A, 22(3), 477, 2004 |
| No. | Article |
|---|---|
| 1 |
Ionized magnetron sputter deposition of hard nanocomposite TiN/amorphous-silicon nitride films Phinichka N, Chandra R, Barber ZH Journal of Vacuum Science & Technology A, 22(3), 477, 2004 |