검색결과 : 10건
| No. | Article |
|---|---|
| 1 |
Preferential orientation effects in partial melt laser crystallization of silicon Witte DJ, Masbou MPA, Crnogorac F, Pease RFW, Pickard DS Journal of Vacuum Science & Technology B, 26(6), 2455, 2008 |
| 2 |
Rapid partial melt crystallization of silicon for monolithic three-dimensional integration Witte DJ, Pickard DS, Crnogorac F, Pianetta P, Pease RFW Journal of Vacuum Science & Technology B, 25(6), 1989, 2007 |
| 3 |
Monolithic multichannel secondary electron detector for distributed axis electron beam lithography and inspection Pickard DS, Kenney C, Tanimoto S, Crane T, Groves T, Pease RFW Journal of Vacuum Science & Technology B, 25(6), 2277, 2007 |
| 4 |
Distributed axis electron beam technology for maskless lithography and defect inspection Pickard DS, Groves TR, Meisburger WD, Crane T, Pease RF Journal of Vacuum Science & Technology B, 21(6), 2834, 2003 |
| 5 |
Distributed axis electron-beam system for lithography and inspection - preliminary experimental results Pickard DS, Campbell C, Crane T, Cruz-Rivera LJ, Davenport A, Meisburger WD, Pease RFW, Groves TR Journal of Vacuum Science & Technology B, 20(6), 2662, 2002 |
| 6 |
Charging and discharging of electron beam resist films Bai M, Pease RFW, Tanasa C, McCord MA, Pickard DS, Meisburger D Journal of Vacuum Science & Technology B, 17(6), 2893, 1999 |
| 7 |
Maskless extreme ultraviolet lithography Choksi N, Pickard DS, McCord M, Pease RFW, Shroff Y, Chen YJ, Oldham W, Markle D Journal of Vacuum Science & Technology B, 17(6), 3047, 1999 |
| 8 |
Patterned negative electron affinity photocathodes for maskless electron beam lithography Schneider JE, Sen P, Pickard DS, Winograd GI, McCord MA, Pease RFW, Spicer WE, Baum AW, Costello KA, Davis GA Journal of Vacuum Science & Technology B, 16(6), 3192, 1998 |
| 9 |
Lifetime and reliability results for a negative electron affinity photocathode in a demountable vacuum system Sen P, Pickard DS, Schneider JE, McCord MA, Pease RF, Baum AW, Costello KA Journal of Vacuum Science & Technology B, 16(6), 3380, 1998 |
| 10 |
Development of Ion Sources for Ion Projection Lithography Lee Y, Gough RA, Kunkel WB, Leung KN, Perkins LT, Pickard DS, Sun L, Vujic J, Williams MD Journal of Vacuum Science & Technology B, 14(6), 3947, 1996 |