검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Thermal and excimer laser assisted growth of Si(1-x)Gex alloys from Si2H6 and GeH4 monitored by on line single wavelength ellipsometry and ex situ atomic force microscopy Larciprete R, Cozzi S, Pieretti S, Padeletti G, Masetti E, Montecchi M Journal of Vacuum Science & Technology A, 16(2), 644, 1998 |
| 2 |
KrF laser epitaxy of silicon germanium alloy layers by irradiation of Si(1-x)Gex/Si (100) structures Larciprete R, Grimaldi MG, Borsella E, Cozzi S, Martelli S, Pieretti S, Vianey I Journal of Vacuum Science & Technology B, 16(3), 1589, 1998 |