검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Control of the preferred orientation of AlN thin films by collimated sputtering Rodriguez-Navarro A, Otano-Rivera W, Pilione LJ, Messier R, Garcia-Ruiz JM Journal of Vacuum Science & Technology A, 16(3), 1244, 1998 |
| 2 |
Cubic boron nitride thin film deposition by unbalanced magnetron sputtering and dc pulsed substrate biasing Otano-Rivera W, Pilione LJ, Zapien JA, Messier R Journal of Vacuum Science & Technology A, 16(3), 1331, 1998 |
| 3 |
Effect of Stoichiometry on the Phases Present in Boron-Nitride Thin-Films Hackenberger LB, Pilione LJ, Messier R, Lamaze GP Journal of Vacuum Science & Technology A, 12(4), 1569, 1994 |