검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Characterization of Phosphosilicate Glass-Films Obtained Using Plasma-Enhanced Chemical-Vapor-Deposition from Tetraethylorthosilicate and Trimethylphosphite Pillote CL, Shemansky FA, Cale TS, Raupp GB Thin Solid Films, 236(1-2), 287, 1993 |