검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Patterning of nanometer-scale silicide structures on silicon by'direct writing focus ion-beam implantation' Mitan MM, Pivin DP, Alford TL, Mayer JW Thin Solid Films, 411(2), 219, 2002 |
| 2 |
Direct patterning of nanometer-scale silicide structures by focused ion-beam implantation through a thin barrier layer Mitan MM, Pivin DP, Alford TL, Mayer JW Journal of Vacuum Science & Technology B, 19(6), 2525, 2001 |