검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Spatial structure of plasma potential oscillation and ion saturation current in VHF multi-tile electrode plasma source Ryan K, O'Farrell D, Ellingboe AR Current Applied Physics, 11(5), S114, 2011 |
| No. | Article |
|---|---|
| 1 |
Spatial structure of plasma potential oscillation and ion saturation current in VHF multi-tile electrode plasma source Ryan K, O'Farrell D, Ellingboe AR Current Applied Physics, 11(5), S114, 2011 |