화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Elastic properties of ultrathin diamond/AlN membranes
Zuerbig V, Hees J, Pletschen W, Sah RE, Wolfer M, Kirste L, Heidrich N, Nebel CE, Ambacher O, Lebedev V
Thin Solid Films, 558, 267, 2014
2 Sidewall slope control of chemically assisted ion-beam etched structures in InP-based materials
Daleiden J, Czotscher K, Hoffmann C, Kiefer R, Klussmann S, Muller S, Nutsch A, Pletschen W, Weisser S, Trankle G, Braunstein J, Weimann G
Journal of Vacuum Science & Technology B, 16(4), 1864, 1998