검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Simulations of radical and ion fluxes on a wafer in a Cl-2/Ar inductively coupled plasma discharge: Confrontation with GaAs and GaN etch experiments Despiau-Pujo E, Chabert P, Bansropun S, Thenot D, Plouhinec P, Cassette S Journal of Vacuum Science & Technology B, 28(4), 693, 2010 |