검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Ionization and mass spectrometry of decaborane for shallow implantation of boron into silicon Sosnowski M, Albano MA, Babaram V, Gurudath R, Poate JM, Jacobson D Journal of the Electrochemical Society, 147(11), 4329, 2000 |
| 2 |
The Mechanisms of Iron Gettering in Silicon by Boron Ion-Implantation Benton JL, Stolk PA, Eaglesham DJ, Jacobson DC, Cheng JY, Poate JM, Myers SM, Haynes TE Journal of the Electrochemical Society, 143(4), 1406, 1996 |
| 3 |
Surface Roughness-Induced Artifacts in Secondary-Ion Mass-Spectrometry Depth Profiling and a Simple Technique to Smooth the Surface Herner SB, Gila BP, Jones KS, Gossmann HJ, Poate JM, Luftman HS Journal of Vacuum Science & Technology B, 14(6), 3593, 1996 |