검색결과 : 2건
No. | Article |
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1 |
Preparation of copper-incorporated mesoporous alumina abrasive and its CMP behavior on hard disk substrate Lei H, Jiang L, Chen RL Powder Technology, 219, 99, 2012 |
2 |
Preparation of porous Fe2O3/SiO2 nanocomposite abrasives and their chemical mechanical polishing behaviors on hard disk substrates Li H, Lei H, Chen RL Thin Solid Films, 520(19), 6174, 2012 |