검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Modeling the effects of particle deformation in chemical mechanical polishing Chen XC, Zhao YW, Wang YG Applied Surface Science, 258(22), 8469, 2012 |
| 2 |
Mechanical effects of polishing pad in copper electrochemical mechanical deposition for planarization Jeong S, Lee S, Park B, Kim H, Kim S, Jeong H Current Applied Physics, 10(1), 299, 2010 |