검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Lithography and Fabrication Processes for Sub-100 nm Scale Complementary Metal-Oxide-Semiconductor Wind SJ, Taur Y, Lee YH, Mii Y, Viswanathan RG, Bucchignano JJ, Pomerene AT, Sicina RM, Milkove KR, Stiebritz JW, Roy RA, Hu CK, Manny MP, Cohen S, Chen W Journal of Vacuum Science & Technology B, 13(6), 2688, 1995 |
| 2 |
Effect of Photo Acid Generator Concentration on the Process Latitude of a Chemically Amplified Resist Petrillo KE, Pomerene AT, Babich ED, Seeger DE, Hofer D, Breyta G, Ito H Journal of Vacuum Science & Technology B, 12(6), 3863, 1994 |
| 3 |
Optical-Properties of Hydrogenated Amorphous-Carbon Film for Attenuated Phase-Shift Mask Applications Callegari A, Pomerene AT, Hovel HJ, Babich ED, Purushothaman S, Shaw JM Journal of Vacuum Science & Technology B, 11(6), 2697, 1993 |