검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Arc generation from sputtering plasma-dielectric inclusion interactions Wickersham CE, Poole JE, Fan JS Journal of Vacuum Science & Technology A, 20(3), 833, 2002 |
| 2 |
Video analysis of inclusion induced macroparticle emission from aluminum sputtering targets Wickersham CE, Poole JE, Fan JS, Zhu L Journal of Vacuum Science & Technology A, 19(6), 2741, 2001 |
| 3 |
Measurements of the critical inclusion size for arcing and macroparticle ejection from aluminum sputtering targets Wickersham CE, Poole JE, Leybovich A, Zhu L Journal of Vacuum Science & Technology A, 19(6), 2767, 2001 |
| 4 |
Effects of Ion-Induced Electron-Emission on Magnetron Plasma Instabilities Hendricks MB, Smith PC, Ruzic DN, Leybovich A, Poole JE Journal of Vacuum Science & Technology A, 12(4), 1408, 1994 |