화학공학소재연구정보센터
검색결과 : 6건
No. Article
1 Ferroelectric properties of SOS and SOI pseudo-MOSFETs with HfO2 interlayers
Popov VP, Antonov VA, Ilnitsky MA, Tyschenko IE, Vdovin VI, Miakonkikh AV, Rudenko KV
Solid-State Electronics, 159, 63, 2019
2 Comparison of electrical properties of silicon-on-insulator structures fabricated with use of hydrogen slicing and BESOI
Antonova IV, Nikolaev DV, Naumova OV, Popov VP
Electrochemical and Solid State Letters, 7(3), F21, 2004
3 Characterization of silicon-on-insulator structures by high-resolution X-ray diffraction
Antonova IV, Popov VP, Bak-Misiuk J, Domagala JZ
Journal of the Electrochemical Society, 149(8), G490, 2002
4 Properties of silicon oversaturated with implanted hydrogen
Popov VP, Tyschenko IE, Safronov LN, Naumova OV, Antonova IV, Gutakovsky AK, Talochkin AB
Thin Solid Films, 403-404, 500, 2002
5 Effect of annealing at argon pressure up to 1.2 GPa hydrogen-plasma-etched and hydrogen-implanted single-crystalline silicon
Misiuk A, Bak-Misiuk J, Barez A, Romano-Rodriguez A, Antonova IV, Popov VP, Londos CA, Jun J
International Journal of Hydrogen Energy, 26(5), 483, 2001
6 Thermal donor and oxygen precipitate formation in silicon during 450 degrees C treatments under atmospheric and enhanced pressure
Antonova IV, Popov VP, Plotnikov AE, Misiuk A
Journal of the Electrochemical Society, 146(4), 1575, 1999