검색결과 : 2건
No. | Article |
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1 |
Reactive Ion Etching of Vapor-Phase Deposited Polyimide Films in CF4/O-2 - Effect on Surface-Morphology Popova K, Spassova E, Zhivkov I, Danev G Thin Solid Films, 274(1-2), 31, 1996 |
2 |
Reactive Ion Etching of Nb Thin-Films for Nb/Al-Alox/Nb Josephson Tunnel-Junctions Popova K, Lea WF, Hutson D, Sydow JP, Pegrum CM Thin Solid Films, 239(2), 245, 1994 |