검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Effect of ultraviolet curing wavelength on low-k dielectric material properties and plasma damage resistance Marsik P, Urbanowicz AM, Verdonck P, De Roest D, Sprey H, Baklanov MR Thin Solid Films, 519(11), 3619, 2011 |
| 2 |
Porogen residues detection in optical properties of low-k dielectrics cured by ultraviolet radiation Marsik P, Verdonck P, De Roest D, Baklanov MR Thin Solid Films, 518(15), 4266, 2010 |