검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Profiling of ultrashallow junctions Goeckner MJ, Felch SB, Fang Z, Oberhofer A, Chia VKF, Mount GR, Poulakos M, Keenan WA Journal of Vacuum Science & Technology B, 18(1), 472, 2000 |
| No. | Article |
|---|---|
| 1 |
Profiling of ultrashallow junctions Goeckner MJ, Felch SB, Fang Z, Oberhofer A, Chia VKF, Mount GR, Poulakos M, Keenan WA Journal of Vacuum Science & Technology B, 18(1), 472, 2000 |