검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Study of Chemical Structure and Removal of Positive-Tone Novolak Resist Having Various Prebake Temperature using Wet Ozone Angata Y, Goto Y, Takahashi S, Kono A, Koike K, Nishiyama I, Kamoto R, Horibe H KAGAKU KOGAKU RONBUNSHU, 39(2), 144, 2013 |