화학공학소재연구정보센터
검색결과 : 7건
No. Article
1 Microfabrication and characterization of gridded polycrystalline silicon field emitter devices
Huq SE, Huang M, Wilshaw PR, Prewett PD
Journal of Vacuum Science & Technology B, 16(2), 796, 1998
2 Comparative study of AZPN114 and SAL601 chemically amplified resists for electron beam nanolithography
Cui Z, Gerardino A, Gentili M, DiFabrizio E, Prewett PD
Journal of Vacuum Science & Technology B, 16(6), 3284, 1998
3 Comparative study of gated single crystal silicon and polysilicon field emitters
Huq SE, Grayer GH, Prewett PD
Journal of Vacuum Science & Technology B, 15(6), 2855, 1997
4 Polycrystalline Silicon Field Emitters
Boswell EC, Huq SE, Huang M, Prewett PD, Wilshaw PR
Journal of Vacuum Science & Technology B, 14(3), 1910, 1996
5 Focused Ion-Beam Biased Repair of Conventional and Phase-Shift Masks
Cui Z, Prewett PD, Watson JG
Journal of Vacuum Science & Technology B, 14(6), 3942, 1996
6 Fabrication of Sub-10 nm Silicon Tips - A New Approach
Huq SE, Chen L, Prewett PD
Journal of Vacuum Science & Technology B, 13(6), 2718, 1995
7 Effects of Focused Ion-Beam Reticle Repair on Optical Lithography at I-Line and Deep-Ultraviolet Wavelengths
Prewett PD, Martin B, Eastwood AW, Watson JG
Journal of Vacuum Science & Technology B, 11(6), 2427, 1993