검색결과 : 7건
No. | Article |
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1 |
Microfabrication and characterization of gridded polycrystalline silicon field emitter devices Huq SE, Huang M, Wilshaw PR, Prewett PD Journal of Vacuum Science & Technology B, 16(2), 796, 1998 |
2 |
Comparative study of AZPN114 and SAL601 chemically amplified resists for electron beam nanolithography Cui Z, Gerardino A, Gentili M, DiFabrizio E, Prewett PD Journal of Vacuum Science & Technology B, 16(6), 3284, 1998 |
3 |
Comparative study of gated single crystal silicon and polysilicon field emitters Huq SE, Grayer GH, Prewett PD Journal of Vacuum Science & Technology B, 15(6), 2855, 1997 |
4 |
Polycrystalline Silicon Field Emitters Boswell EC, Huq SE, Huang M, Prewett PD, Wilshaw PR Journal of Vacuum Science & Technology B, 14(3), 1910, 1996 |
5 |
Focused Ion-Beam Biased Repair of Conventional and Phase-Shift Masks Cui Z, Prewett PD, Watson JG Journal of Vacuum Science & Technology B, 14(6), 3942, 1996 |
6 |
Fabrication of Sub-10 nm Silicon Tips - A New Approach Huq SE, Chen L, Prewett PD Journal of Vacuum Science & Technology B, 13(6), 2718, 1995 |
7 |
Effects of Focused Ion-Beam Reticle Repair on Optical Lithography at I-Line and Deep-Ultraviolet Wavelengths Prewett PD, Martin B, Eastwood AW, Watson JG Journal of Vacuum Science & Technology B, 11(6), 2427, 1993 |