검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Iridium/silicon capping layer for soft x-ray and extreme ultraviolet mirrors Prisbrey ST, Vernon SP, Clift WM Journal of Vacuum Science & Technology B, 23(6), 2378, 2005 |
| 2 |
Actinic detection of sub-100 nm defects on extreme ultraviolet lithography mask blanks Jeong ST, Johnson L, Rekawa S, Walton CC, Prisbrey ST, Tejnil E, Underwood JH, Bokor J Journal of Vacuum Science & Technology B, 17(6), 3009, 1999 |