검색결과 : 3건
No. | Article |
---|---|
1 |
Cryogenic etch process development for profile control of high aspect-ratio submicron silicon trenches Pruessner MW, Rabinovich WS, Stievater TH, Park D, Baldwin JW Journal of Vacuum Science & Technology B, 25(1), 21, 2007 |
2 |
Chemical and thermal stability of alkanethiol and sulfur passivated InP(100) Lim H, Carraro C, Maboudian R, Pruessner MW, Ghodssi R Langmuir, 20(3), 743, 2004 |
3 |
Design of MEMS-tunable novel monolithic optical filters in InP with horizontal bragg mirrors Datta M, Pruessner MW, Kelly DP, Ghodssi R Solid-State Electronics, 48(10-11), 1959, 2004 |