화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Cryogenic etch process development for profile control of high aspect-ratio submicron silicon trenches
Pruessner MW, Rabinovich WS, Stievater TH, Park D, Baldwin JW
Journal of Vacuum Science & Technology B, 25(1), 21, 2007
2 Chemical and thermal stability of alkanethiol and sulfur passivated InP(100)
Lim H, Carraro C, Maboudian R, Pruessner MW, Ghodssi R
Langmuir, 20(3), 743, 2004
3 Design of MEMS-tunable novel monolithic optical filters in InP with horizontal bragg mirrors
Datta M, Pruessner MW, Kelly DP, Ghodssi R
Solid-State Electronics, 48(10-11), 1959, 2004