검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
High-power laser interference lithography process on photoresist: Effect of laser fluence and polarisation Ellman M, Rodriguez A, Perez N, Echeverria M, Verevkin YK, Peng CS, Berthou T, Wang Z, Olaizola SM, Ayerdi I Applied Surface Science, 255(10), 5537, 2009 |