화학공학소재연구정보센터
검색결과 : 5건
No. Article
1 Utilizing gallium arsenide sacrificial films to inhibit surface roughening during the thermal desorption of gallium arsenide
Pun AF, Zheng JP
Electrochemical and Solid State Letters, 10(6), H189, 2007
2 Reduction of thermal oxide desorption etching on gallium arsenide
Pun AF, Wang X, Durbin SM, Zheng JP
Thin Solid Films, 515(10), 4419, 2007
3 A method for reducing surface roughness during the thermal desorption of silicon
Pun AF, Wang X, Durbin SM, Zheng JP
Thin Solid Films, 504(1-2), 136, 2006
4 Investigation of the growth dynamics of pulsed laser-deposited RuO2 films using in situ resistance measurement and atomic force microscopy
Wang X, Pun AF, Xin Y, Zheng JP
Thin Solid Films, 510(1-2), 82, 2006
5 Trilayer wafer passivation structure for (100) oriented silicon
Pun AF, Wang X, Durbin SM, Zheng JP
Electrochemical and Solid State Letters, 8(10), G258, 2005