검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
ECR plasma etching of GaAs in CCl2F2/Ar/O-2 discharge and IR studies of the etched surface Singh LSS, Tiwary KP, Purohit RK, Zaidi ZH, Husain M Current Applied Physics, 5(4), 351, 2005 |
| No. | Article |
|---|---|
| 1 |
ECR plasma etching of GaAs in CCl2F2/Ar/O-2 discharge and IR studies of the etched surface Singh LSS, Tiwary KP, Purohit RK, Zaidi ZH, Husain M Current Applied Physics, 5(4), 351, 2005 |