검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
X-ray photoelectron spectroscopy analyses of metal stacks etched in Cl-2/BCl3 high density plasmas Czuprynski P, Joubert O, Vallier L, Puttock M, Heitzmann M Journal of Vacuum Science & Technology B, 16(1), 147, 1998 |
| 2 |
Top surface imaging process at and below quarter-micron resolution and pattern transfer into metal Irmscher M, Hofflinger B, Reuter C, Springer R, Stauffer C, Puttock M Journal of Vacuum Science & Technology B, 15(6), 2605, 1997 |