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| No. | Article |
|---|---|
| 1 |
New Approach of rim Phase-Shifting Mask for High-Density Circuit Layout Dao G, Tam N, Hainsey R, Qian QD, Neff J, Nasreesfahani B, Deeter T, Fujimoto H, Troccolo P Journal of Vacuum Science & Technology B, 12(6), 3804, 1994 |