화학공학소재연구정보센터
검색결과 : 11건
No. Article
1 Interface properties and bias temperature instability with ternary H-Cl-N mixed plasma post-oxidation annealing in 4H-SiC MOS capacitors
Yang C, Zhang FL, Yin ZP, Su Y, Qin FW, Wang DJ
Applied Surface Science, 488, 293, 2019
2 Structural, morphological, photoluminescence and photocatalytic properties of Gd-doped ZnO films
Yi XY, Ma CY, Yuan F, Wang N, Qin FW, Hu BC, Zhang QY
Thin Solid Films, 636, 339, 2017
3 Passivation of SiO2/4H-SiC interface defects via electron cyclotron resonance hydrogen-nitrogen mixed plasma pretreatment for SiC surface combined with post-oxidation annealing
Liu BB, Qin FW, Wang DJ
Applied Surface Science, 364, 769, 2016
4 Realization of nitride-oxide based p-n heterojunctions with the n-VO2/p-GaN/sapphire structure
Li XX, Bian JM, Wang MH, Miao LH, Liu HZ, Qin FW, Zhang YZ, Luo YM
Materials Research Bulletin, 77, 199, 2016
5 Enhanced TiC/SiC Ohmic contacts by ECR hydrogen plasma pretreatment and low-temperature post-annealing
Liu BB, Qin FW, Wang DJ
Applied Surface Science, 355, 59, 2015
6 Low-temperature growth of highly c-oriented GaN films on Cu coated glass substrates with ECR-PEMOCVD
Liu YM, Qin FW, Zhang D, Bian JM, Zhao Y, Wang EP, Wang S, Zhong MM, Ju ZH
Journal of Crystal Growth, 368, 92, 2013
7 Influence of Ar/H-2 ratio on the characteristics of phosphorus-doped hydrogenated nanocrystalline silicon films prepared by electron cyclotron resonance plasma-enhanced chemical vapor deposition
Zhang XY, Wu AM, Shi SF, Qin FW, Bian JM
Thin Solid Films, 521, 181, 2012
8 Cleaning of SiC surfaces by low temperature ECR microwave hydrogen plasma
Huang LQ, Zhu QZ, Gao MC, Qin FW, Wang DJ
Applied Surface Science, 257(23), 10172, 2011
9 Highly c-axis oriented GaN films grown on free-standing diamond substrates for high-power devices
Zhang D, Bian JM, Qin FW, Wang J, Pan L, Zhao JM, Zhao Y, Bai YZ, Du GT
Materials Research Bulletin, 46(10), 1582, 2011
10 Electron cyclotron resonance plasma enhanced metalorganic chemical vapor deposition system with monitoring in situ for epitaxial growth of group-III nitrides
Xu Y, Gu B, Qin FW
Journal of Vacuum Science & Technology A, 22(2), 302, 2004