검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Low dielectric constant plasma polymerized methyl-cyclohexane thin films deposited by inductively coupled plasma-enhanced chemical vapor deposition Jo H, Quan YC, Jung D Thin Solid Films, 384(1), 33, 2001 |
| 2 |
The interface formation and adhesion of metals (Cu, Ta, and Ti) and low dielectric constant polymer-like organic thin films deposited by plasma-enhanced chemical vapor deposition using para-xylene precursor Kim KS, Jang YC, Kim HJ, Quan YC, Choi J, Jung D, Lee NE Thin Solid Films, 377-378, 122, 2000 |