화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Gate oxide properties investigated by TOF-SIMS profiles on CMOS devices
Zanderigo F, Brazzelli D, Rocca S, Pregnolato A, Grossi A, Queirolo G
Applied Surface Science, 203, 437, 2003
2 Influence of roughness and grain dimension on the optical functions of polycrystalline silicon films
Borghesi A, Tallarida G, Amore G, Cazzaniga F, Queirolo G, Alessandri M, Sassella A
Thin Solid Films, 313-314, 243, 1998