검색결과 : 1건
No. | Article |
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1 |
Time-Dependence and Spatial-Distribution of the Deposition Rate of YBa2Cu3O7 Thin-Films in 90-Degrees Off-Axis Sputtering Quigley PG, Rao RA, Eom CB Journal of Vacuum Science & Technology A, 15(6), 2854, 1997 |
No. | Article |
---|---|
1 |
Time-Dependence and Spatial-Distribution of the Deposition Rate of YBa2Cu3O7 Thin-Films in 90-Degrees Off-Axis Sputtering Quigley PG, Rao RA, Eom CB Journal of Vacuum Science & Technology A, 15(6), 2854, 1997 |