검색결과 : 1건
No. | Article |
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1 |
Effect of target self-bias voltage on the mechanical properties of diamond-like carbon films deposited by RF magnetron sputtering Chowdhury S, Laugier MT, Rahman IZ Thin Solid Films, 468(1-2), 149, 2004 |
No. | Article |
---|---|
1 |
Effect of target self-bias voltage on the mechanical properties of diamond-like carbon films deposited by RF magnetron sputtering Chowdhury S, Laugier MT, Rahman IZ Thin Solid Films, 468(1-2), 149, 2004 |