검색결과 : 13건
| No. | Article |
|---|---|
| 1 |
Planar laser-induced fluorescence of CF2 in O-2/CF4 and O-2/C2F6 chamber-cleaning plasmas: Spatial uniformity and comparison to electrical measurements Steffens KL, Sobolewski MA Journal of Vacuum Science & Technology A, 17(2), 517, 1999 |
| 2 |
Electrical control of the spatial uniformity of reactive species in plasmas Sobolewski MA, Steffens KL Journal of Vacuum Science & Technology A, 17(6), 3281, 1999 |
| 3 |
Optical emission diagnostics in cascade arc plasma polymerization and surface modification processes Yu QS, Krentsel E, Yasuda HK Journal of Polymer Science Part A: Polymer Chemistry, 36(10), 1583, 1998 |
| 4 |
Plasma polymerization of fluoromethanes Iriyama Y, Noda M Journal of Polymer Science Part A: Polymer Chemistry, 36(12), 2043, 1998 |
| 5 |
Thin film deposition from plasmas of tetramethylsilane-helium-argon mixtures with oxygen and with nitrogen Da Cruz NC, Durrant SF, De Moraes MAB Journal of Polymer Science Part B: Polymer Physics, 36(11), 1873, 1998 |
| 6 |
Conventional and dynamic actinometry of glow discharges fed mixtures of tetramethylsilane, sulfur hexafluoride, and helium Durrant SF, de Moraes MAB Journal of Vacuum Science & Technology A, 16(2), 509, 1998 |
| 7 |
Electrical optimization of plasma-enhanced chemical vapor deposition chamber cleaning plasmas Sobolewski MA, Langan JG, Felker BS Journal of Vacuum Science & Technology B, 16(1), 173, 1998 |
| 8 |
Plasma-Enhanced Chemical-Vapor-Deposition of Fluorocarbon Films with High Thermal-Resistance and Low Dielectric-Constants Takeishi S, Kudo H, Shinohara R, Hoshino M, Fukuyama S, Yamaguchi J, Yamada M Journal of the Electrochemical Society, 144(5), 1797, 1997 |
| 9 |
Simulation of a 3-Moment Fluid Model of a 2-Dimensional Radio-Frequency Discharge Wilcoxson MH, Manousiouthakis VI Chemical Engineering Science, 51(7), 1089, 1996 |
| 10 |
Construction of a Plasma Polymerization Reactor System for Laboratory Use Huber F, Springer J Journal of Applied Polymer Science, 62(1), 145, 1996 |