검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Large-diameter microwave plasma source excited by azimuthally symmetric surface waves Tuda M, Ono K, Ootera H, Tsuchihashi M, Hanazaki M, Komemura T Journal of Vacuum Science & Technology A, 18(3), 840, 2000 |
| 2 |
Effects of Etch Products and Surface Oxidation on Profile Evolution During Electron-Cyclotron-Resonance Plasma-Etching of Poly-Si Tuda M, Ono K, Nishikawa K Journal of Vacuum Science & Technology B, 14(5), 3291, 1996 |