검색결과 : 1건
No. | Article |
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1 |
Initial Plasma Oxidation-Kinetics of Silicon - DC Bias Effects Kamioka I, Nakamura KG, Kawabe T, Kitajima M Thin Solid Films, 281-282, 98, 1996 |
No. | Article |
---|---|
1 |
Initial Plasma Oxidation-Kinetics of Silicon - DC Bias Effects Kamioka I, Nakamura KG, Kawabe T, Kitajima M Thin Solid Films, 281-282, 98, 1996 |