화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Growth of patterned thin metal oxide films on glass substrates from metallic bulk sources using a Q-switched YAG laser
Mir-Hosseini N, Schmidt MJJ, Li L
Applied Surface Science, 248(1-4), 204, 2005
2 Quantification of nitrogen profiles in HfSiON films for gate dielectrics
Yamamoto T, Miyamoto T, Karen A
Applied Surface Science, 231-2, 561, 2004
3 Effects of ozone as an oxygen source on the properties of the Al2O3 thin films prepared by atomic layer deposition
Kim J, Chakrabarti K, Lee J, Oh KY, Lee C
Materials Chemistry and Physics, 78(3), 733, 2003