검색결과 : 3건
No. | Article |
---|---|
1 |
Growth of patterned thin metal oxide films on glass substrates from metallic bulk sources using a Q-switched YAG laser Mir-Hosseini N, Schmidt MJJ, Li L Applied Surface Science, 248(1-4), 204, 2005 |
2 |
Quantification of nitrogen profiles in HfSiON films for gate dielectrics Yamamoto T, Miyamoto T, Karen A Applied Surface Science, 231-2, 561, 2004 |
3 |
Effects of ozone as an oxygen source on the properties of the Al2O3 thin films prepared by atomic layer deposition Kim J, Chakrabarti K, Lee J, Oh KY, Lee C Materials Chemistry and Physics, 78(3), 733, 2003 |